| 1. Identity statement | ||||
| Reference Type | Journal Article | |||
| Site | mtc-m21d.sid.inpe.br | |||
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S | |||
| Identifier | 8JMKD3MGP3W34T/483JR55 | |||
| Repository | sid.inpe.br/mtc-m21d/2022/11.21.12.14 (restricted access) | |||
| Last Update | 2022:11.21.12.14.48 (UTC) simone | |||
| Metadata Repository | sid.inpe.br/mtc-m21d/2022/11.21.12.14.48 | |||
| Metadata Last Update | 2023:01.03.16.46.24 (UTC) administrator | |||
| DOI | 10.3390/ma15217416 | |||
| ISSN | 1996-1944 | |||
| Citation Key | SierraGomezSilFraCorTra:2022:SuMoSp | |||
| Title | Surface Morphology and Spectroscopic Features of Homoepitaxial Diamond Films Prepared by MWPACVD at High CH4 Concentrations  | |||
| Year | 2022 | |||
| Month | Nov. | |||
| Access Date | 2024, May 19 | |||
| Type of Work | journal article | |||
| Secondary Type | PRE PI | |||
| Number of Files | 1 | |||
| Size | 4398 KiB | |||
| 2. Context | ||||
| Author | 1 Sierra Gomez, Javier 2 Silva Neto, José Vieira da 3 Fraga, Mariana Amorim 4 Corat, Evaldo José 5 Trava-Airoldi, Vladimir Jesus | |||
| Resume Identifier | 1 2 3 4 8JMKD3MGP5W/3C9JH33 | |||
| ORCID | 1 0000-0002-2635-6254 2 3 0000-0001-6976-8550 | |||
| Group | 1 CMS-ETES-DIPGR-INPE-MCTI-GOV-BR 2 CMS-ETES-DIPGR-INPE-MCTI-GOV-BR 3 4 COPDT-CGIP-INPE-MCTI-GOV-BR 5 COPDT-CGIP-INPE-MCTI-GOV-BR | |||
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Universidade Presbiteriana Mackenzie 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) | |||
| Author e-Mail Address | 1 javier.sierra@inpe.br 2 jvneto.ifsp@gmail.com 3 4 evaldo.corat@inpe.br 5 vladimirjta@gmail.com | |||
| Journal | Materials | |||
| Volume | 15 | |||
| Number | 21 | |||
| Pages | e7416 | |||
| Secondary Mark | A1_ENGENHARIAS_I A2_MATERIAIS B1_ODONTOLOGIA B1_ENGENHARIAS_II B2_QUÍMICA B2_CIÊNCIAS_BIOLÓGICAS_II B2_BIOTECNOLOGIA B2_ASTRONOMIA_/_FÍSICA | |||
| History (UTC) | 2022-11-21 12:15:23 :: simone -> administrator :: 2022 2022-12-08 10:06:24 :: administrator -> simone :: 2022 2022-12-20 13:16:00 :: simone -> administrator :: 2022 2023-01-03 16:46:24 :: administrator -> simone :: 2022 | |||
| 3. Content and structure | ||||
| Is the master or a copy? | is the master | |||
| Content Stage | completed | |||
| Transferable | 1 | |||
| Content Type | External Contribution | |||
| Version Type | publisher | |||
| Keywords | single crystal diamond microwave plasma-assisted CVD morphology defects homoepitaxial growth | |||
| Abstract | Single crystal diamond (SCD) is a promising material to satisfy emerging requirements of high-demand fields, such as microelectronics, beta batteries and wide-spectrum optical communication systems, due to its excellent optical characteristics, elevated breakdown voltage, high hardness and superior thermal conductivity. For such applications, it is essential to study the optically active defects in as-grown diamonds, namely three-dimensional defects (such as stacking faults and dislocations) and the inherent defects arising from the cultivation method. This paper reports the growth of SCD films on a commercial HPHT single-crystal diamond seed substrate using a 2.45 GHz microwave plasma-assisted chemical vapor deposition (MWPACVD) technique by varying the methane (CH4) gas concentration from 6 to 12%, keeping the other parameters constant. The influence of the CH4 concentration on the properties, such as structural quality, morphology and thickness, of the highly oriented SCD films in the crystalline plane (004) was investigated and compared with those on the diamond substrate surface. The SCD film thickness is dependent on the CH4 concentration, and a high growth rate of up to 27 mu m/h can be reached. Raman spectroscopy, high-resolution X-ray diffractometry (HRXRD), scanning electron microscopy (SEM), surface profilometry and optical microscopic analyses showed that the produced homoepitaxial SCD films are of good quality with few macroscopic defects. | |||
| Area | FISMAT | |||
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > Surface Morphology and... | |||
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção a partir de 2021 > CGCE > Surface Morphology and... | |||
| Arrangement 3 | urlib.net > BDMCI > Fonds > Produção a partir de 2021 > CGIP > Surface Morphology and... | |||
| doc Directory Content | access | |||
| source Directory Content | there are no files | |||
| agreement Directory Content |
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| 4. Conditions of access and use | ||||
| Language | en | |||
| Target File | materials-15-07416.pdf | |||
| User Group | simone | |||
| Reader Group | administrator simone | |||
| Visibility | shown | |||
| Read Permission | deny from all and allow from 150.163 | |||
| Update Permission | not transferred | |||
| 5. Allied materials | ||||
| Next Higher Units | 8JMKD3MGPCW/3F358GL 8JMKD3MGPCW/46KTFK8 8JMKD3MGPCW/46KUES5 | |||
| Citing Item List | sid.inpe.br/bibdigital/2022/04.03.23.11 4 sid.inpe.br/bibdigital/2013/10.14.21.39 1 | |||
| Dissemination | WEBSCI; PORTALCAPES; SCOPUS. | |||
| Host Collection | urlib.net/www/2021/06.04.03.40 | |||
| 6. Notes | ||||
| Empty Fields | alternatejournal archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url | |||
| 7. Description control | ||||
| e-Mail (login) | simone | |||
| update | ||||